From Sony:
OCL: On Chip Lens
PSD: Pyramid Shaped Diffractor (lightguide)
DTI: Deep Trench Isolation
Near-infrared Sensitivity Enhancement of a Back-illuminated Complementary Metal Oxide Semiconductor Image Sensor with a Pyramid Surface for Diffraction Structure,
I. Oshiyama, S. Yokogawa, H. Ikeda, Y. Ebiko, T. Hirano, S. Saito, T. Oinoue, Y. Hagimoto, H. Iwamoto, Sony Semiconductor
Boosting Near-Infrared Sensitivity in CMOS Imagers: Backside-illuminated CMOS image sensors are ubiquitous in camera phones, and there is a growing demand for them to be able to handle near-infrared (NIR) light frequencies so that they can be used in iris scanning, facial recognition and motion-sensing applications. However, the NIR-sensitivity of silicon CMOS image sensors has been inadequate. The simplest way to enhance it would be to make the photo-absorption layer thicker, but that would require substantial capital investment in manufacturing equipment like high-energy ion implanters to be able to work with the thicker layer. Instead, Sony researchers developed a way to increase the NIR sensitivity of a 2-megapixel backside imager by building pyramidal light-diffraction structures on its surface. These 400nm structures diffract and trap the light coming to each pixel. The researchers also isolated each 1.12µm pixel from its neighbors by means of a special treatment process and used deep trench isolation to reduce crosstalk. They achieved a 50% increase in NIR sensitivity and a quantum efficiency of 30% at 850nm. Image resolution and levels of dark current (i.e., electrical “noise”) were not compromised.
The image is a photomicrograph of a section of a backside-illuminated CMOS image sensor with a cell size of 1.12µm and pyramid surfaces for diffraction (PSD) and deep-trench isolation (DTI) structures. The PSD pitch was 400 nm.
https://ieee-iedm.org/session-16-optoelectronics-displays-and-imagers-image-sensors-and-single-photon-detectors/
similar technology from Panasonic, SmartFSI:
using 2 organic film layer, one for normal light, one for NIR
black silicon sensor SiOnyx from Ach Tech looks interesting
OCL: On Chip Lens
PSD: Pyramid Shaped Diffractor (lightguide)
DTI: Deep Trench Isolation
Near-infrared Sensitivity Enhancement of a Back-illuminated Complementary Metal Oxide Semiconductor Image Sensor with a Pyramid Surface for Diffraction Structure,
I. Oshiyama, S. Yokogawa, H. Ikeda, Y. Ebiko, T. Hirano, S. Saito, T. Oinoue, Y. Hagimoto, H. Iwamoto, Sony Semiconductor
Boosting Near-Infrared Sensitivity in CMOS Imagers: Backside-illuminated CMOS image sensors are ubiquitous in camera phones, and there is a growing demand for them to be able to handle near-infrared (NIR) light frequencies so that they can be used in iris scanning, facial recognition and motion-sensing applications. However, the NIR-sensitivity of silicon CMOS image sensors has been inadequate. The simplest way to enhance it would be to make the photo-absorption layer thicker, but that would require substantial capital investment in manufacturing equipment like high-energy ion implanters to be able to work with the thicker layer. Instead, Sony researchers developed a way to increase the NIR sensitivity of a 2-megapixel backside imager by building pyramidal light-diffraction structures on its surface. These 400nm structures diffract and trap the light coming to each pixel. The researchers also isolated each 1.12µm pixel from its neighbors by means of a special treatment process and used deep trench isolation to reduce crosstalk. They achieved a 50% increase in NIR sensitivity and a quantum efficiency of 30% at 850nm. Image resolution and levels of dark current (i.e., electrical “noise”) were not compromised.
The image is a photomicrograph of a section of a backside-illuminated CMOS image sensor with a cell size of 1.12µm and pyramid surfaces for diffraction (PSD) and deep-trench isolation (DTI) structures. The PSD pitch was 400 nm.
https://ieee-iedm.org/session-16-optoelectronics-displays-and-imagers-image-sensors-and-single-photon-detectors/
similar technology from Panasonic, SmartFSI:
using 2 organic film layer, one for normal light, one for NIR
black silicon sensor SiOnyx from Ach Tech looks interesting
留言
張貼留言